![Wartung der 200-mm-Plasmaätzanlage »Applied Materials Centura 5200«, die von memsstar komplett überholt und erweitert wurde. © Fraunhofer ENAS / Cornelia Schubert / Maintenance on the “Applied Materials Centura 5200” 200 mm plasma etching tool fully remanufactured and augmented by memsstar. © Fraunhofer ENAS / Cornelia Schubert Wartung der 200-mm-Plasmaätzanlage »Applied Materials Centura 5200«, die von memsstar komplett überholt und erweitert wurde. © Fraunhofer ENAS / Cornelia Schubert / Maintenance on the “Applied Materials Centura 5200” 200 mm plasma etching tool fully remanufactured and augmented by memsstar. © Fraunhofer ENAS / Cornelia Schubert](/uploads/images/_scale/appliedmaterialscentura5200maintenancememsstarfraunhoferenas_169_626x352.jpg)
![Laufende Arbeiten an der Centura 5200. © Fraunhofer ENAS / Cornelia Schubert / Work in progress at the Centura 5200. © Fraunhofer ENAS / Cornelia Schubert Laufende Arbeiten an der Centura 5200. © Fraunhofer ENAS / Cornelia Schubert / Work in progress at the Centura 5200. © Fraunhofer ENAS / Cornelia Schubert](/uploads/images/_scale/centura5200memsstarfraunhoferenas_169_626x352.jpg)
-
- Company
Fraunhofer ENAS extends cooperation with memsstar
Fraunhofer ENAS and memsstar Limited are partnering. In order to ensure the quality of the reactive ion etching processes in MEMS manufacturing and the throughput Fraunhofer ENAS works now with a fully remanufactured “Applied Materials Centura 5200” 200 mm plasma etching tool.
The Fraunhofer Institute…