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All publications for the rubric Automation

LITHOSCALE® macht maskenbezogene Verbrauchsmaterialien überflüssig, während die einstellbare Festkörperlaser-Belichtungsquelle auf hohe Redundanz und lange Lebensdauer ausgelegt ist und praktisch keine Wartung und keine Neukalibrierung erfordert. / LITHOSCALE® eliminates mask-related consumables with its mask-free approach, while its tunable solid-state laser exposure source is designed for high redundancy and long life-time stability with virtually no maintenance and no re-calibration required. Das LITHOSCALE® Maskless Exposure System von EV Group macht die Vorteile der digitalen Lithographie in der Hochvolumenproduktion nutzbar. / The LITHOSCALE® maskless exposure system from EV Group brings the benefits of digital lithography to high-volume manufacturing.
  • Automation

LITHOSCALE® incorporates EVG’s MLE™ (Maskless Exposure) technology to bring the benefits of digital lithography to a wide range of applications and markets

EV Group Brings Maskless Lithography to High-Volume Manufacturing with LITHOSCALE

EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today introduced the LITHOSCALE® maskless exposure system – the first product platform to feature EVG’s revolutionary MLE™ (Maskless Exposure) technology. LITH…

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