Linear Hoist System

Linear Hoist

Linear Hoist Grafik

The production of semiconductors requires a large number of production steps, which are carried out at so-called equipment stations. For effective semiconductor production, the individual stations must be supplied with wafers in a timely and flexible manner, so this is becoming increasingly automated. For this purpose, different conveyor systems are used in the fabs (factories for semiconductor production) for the containers in which the wafers are stored and transported.

Schiller's Linear Hoist System ensures automated supply of production or measuring equipment with the wafers between the individual bays (production areas) of a fab. In addition to the savings potential on the personnel side, the Linear Hoist System also has positive effects on the utilisation of the connected equipment. Significant increases in equipment utilisation can be achieved with the Linear Hoist due to shorter waiting times of the equipment when changing cassettes. The system can be used for various containers (FOUP, FOSB, 200mm/300mm cassettes) and complies with cleanroom class ISO-3.

In contrast to classic shuttle systems, the Linear Hoist System is not rail-bound. The ceiling portal with an x- and y-axis and a descender unit (z-axis) enables a high degree of flexibility when approaching the equipment and offers a space-saving solution due to its attachment to the ceiling. From there, the containers can be transferred at high speed (x-axis: 2m/s, y- and z-axis: 1m/s) to the transfer ports of the production lines.

In combination with conveyor systems, e.g. the Schiller Cleanroom Transport System or OHT systems (Overhead Hoist Transport), a smooth 24/7 supply with cassettes is possible - without operator intervention.

The inductive, contactless energy transfer along the x- and y-axis as well as the data transfer to the gripper takes place without drag chains via the grab rope. With the high repeat accuracy of the Linear Hoist, load ports on the equipment or Cinematic Coupling pins on the Schiller Cleanroom Transport System can be run reliably with absolute reproducibility.

For intermediate storage (buffer locations), it is also possible to integrate a ceiling mounted warehouse. This allows the wafers to be positioned very close to the process and supplied to the production stations without any loss of time. The number of storage slots can be adapted depending on the dimensions of the linear hoist system and can be up to several hundred storage slots.