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Cobots halten Einzug in die Reinräume der Elektronikindustrie. In der Halbleiterproduktion punkten sie mit Verlässlichkeit und höchsten Qualitätsstandards. / Cobots enter the cleanrooms of the electronics industry. In the production of semiconductors, they score high in reliability as well as top quality standards. Die empfindlichen Siliziumwafern können zusammen pro Kassette den Wert eines Mittelklasse-Autos haben. / Each cassette full of the sensitive silicon wafers can have the value of a mid-range car. Die Reinraum-Roboter transportieren schwarze Kassetten voller Silizium-Wafer zu den einzelnen Bearbeitungsschritten. / The cleanroom robots transport black cassettes full of silicon wafers to the individual processing steps. Millimetergenau legt der KUKA Roboter die Siliziumwafer in die Bearbeitungskammer. / The KUKA robot places the silicon wafers into the processing chamber with millimeter precision. Bei Infineon in Villach kommen 17 Reinraum-Roboter vom TYP LBR iiwa CR zum Einsatz. / At Infineon in Villach, Austria, 17 cleanroom robots of type LBR iiwa CR are in use. Für eine wirtschaftliche Produktion muss Infineon immer das richtige Maß finden zwischen dem Möglichen und dem Sinnvollen. / For cost-effective production, Infineon must always find the right mix of what is possible and what is reasonable. Der sensitive LBR iiwa CR benötigt beim Wafer-Handling keinen Schutzzaun. / The sensitive LBR iiwa CR does not require safety fencing during wafer handling. Lisa Ebner hat die Integration der Reinraum-Roboter in den automatisierten Produktionsprozess von Anfang an mitbetreut. / Lisa Ebner has been involved in the integration of the cleanroom robots into the automated production process from the very beginning

Cobots enter the cleanrooms of the electronics industry. In the production of semiconductors, robots score high in reliability as well as top quality and safety standards.

The new form of human-machine interaction in cleanrooms

Cobots take automation in cleanrooms to a new level. In the production of micrometer-thin chips at Infineon in Villach, Austria, 17 sensitive KUKA lightweight robots work safely together with humans to ensure greater efficiency and safety when fabricating the precious and highly fragile wafers.

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