VDI 2083 sheet 3 clean-room technology - measuring technique in the pure room air
Publisher association of German engineers author VDI society technical
building equipment publishing house Beuth publishing house GmbH
feature place Duesseldorf feature year 2005-07 expenditure 1993-02
side extent of 23 references acceptance test, job, functional test,
immission control, achievement, ventilation, ventilation, air, air
pollution control, air purity, air cleaning, air pollution, in several
languages, measuring instrument, metrology record, measuring system,Measuring technique, measurement, measuring procedure, particle
measurement, testing set, examination, testing method, qualification,
quality assurance, room air, room air-technical plant, category of
purity, pure area, clean-room technology, dust control, monitoring
description guideline for the treatment of airborne particles
regarding the sizes and quantitative determination (not however their
remaining physical, chemical, radiological or biological
characteristics); Requirements of special devices, e.g.
micro-biological safety work benches are in DIN EN 12469 regulated;
Specification from procedures to execution of the measuring
instruments suitable by measurements of clean-spacetechnical plants
and description; Table: Empfolene examinations for the plant; Table:
Functional tests; Measuring procedure (also leakage examination, sound
pressure level...); Table: Requirements of measuring instruments; Documentation the
document applies to measuring procedures and measuring instruments in
connection with acceptance tests and the monitoring of
pure-spacetechnical plants in enterprise. To the examination of the
individual elements of pure-spacetechnical plants separate standards
and guidelines apply. The methods described here are aligned special
to the requirements of pure areas and differ to that extent from
measuring procedures for other technical systems.