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VDI 2083 sheet 3 clean-room technology - measuring technique in the pure room air

Publisher association of German engineers author VDI society technical building equipment publishing house Beuth publishing house GmbH feature place Duesseldorf feature year 2005-07 expenditure 1993-02 side extent of 23 references acceptance test, job, functional test, immission control, achievement, ventilation, ventilation, air, air pollution control, air purity, air cleaning, air pollution, in several languages, measuring instrument, metrology record, measuring system,Measuring technique, measurement, measuring procedure, particle measurement, testing set, examination, testing method, qualification, quality assurance, room air, room air-technical plant, category of purity, pure area, clean-room technology, dust control, monitoring description guideline for the treatment of airborne particles regarding the sizes and quantitative determination (not however their remaining physical, chemical, radiological or biological characteristics); Requirements of special devices, e.g. micro-biological safety work benches are in DIN EN 12469 regulated; Specification from procedures to execution of the measuring instruments suitable by measurements of clean-spacetechnical plants and description; Table: Empfolene examinations for the plant; Table: Functional tests; Measuring procedure (also leakage examination, sound pressure level...); Table: Requirements of measuring instruments; Documentation the document applies to measuring procedures and measuring instruments in connection with acceptance tests and the monitoring of pure-spacetechnical plants in enterprise. To the examination of the individual elements of pure-spacetechnical plants separate standards and guidelines apply. The methods described here are aligned special to the requirements of pure areas and differ to that extent from measuring procedures for other technical systems.

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