Inclusion techniques for quality assurance in the clean-room technology

By inclusion techniques for quality assurance one understands all techniques to local pure areas, Minienvironments etc.. By clean-room technology in the sense of this article all measures are understood for contamination reduction. As Kontaminanten not only partikelfoermige impurities of process media are such as air to understand DI water and other gases and liquids but also not partikelfoermige ionische impurities, influences of electromagnetic radiation, temperature, dampness, electrostatics u.v.a.m. The cocktail at influences can be controlled most easily by the fact that one tries to keep the range of different influences as small by physicochemical barriers as possible. Example for this are SMIF boxes in the semiconductor technology and CIP/SIP in the sterile techniques.It prevails in the different ranges of application of the clean-room technology relative term variety, although it concerns frequently and the same above briefly marked out facts of the contamination containment. The thing in common is to be tried put out and the usual concept formations to be interconnected. In order to establish and maintain errorfriendly clean-spacetechnical systems as well as from a ' postmortem ' at a ' preventive ' point of view arrive, also the defined systems must be continuously examined. Frequently it comes however straight with the sampling, by the measuring technique or by data processing downstream to an influence of the desired measured variable, so that a significant examination of the contamination poverty is connected with difficulties.The fact that and in which form inclusion techniques can contribute to the error friendliness, on the basis microelectronics and by the example of the sterile techniques is pointed out. Detailierte remarks in the attached pdf.