Fraunhofer CNT signs common development outline agreement with large equipment supplier

Fraunhofer CNT announced in November 2011 the signing to common development agreement with ASM internationally of a N.V. (ASM). The agreement covers a multiplicity of new projects in the process next five Jahre.Das the Fraunhofer CNT and ASM thereby new process and integration methods will develop and with ASM � s Advance� series of A412 300 mm vertically pile furnace will begin, which is configured both for the atomic layer separation (ALD) and for the chemical low pressure steam separation (LPCVD). Fraunhofer the CNT will make the premises, infrastructure and his pure area available for a412-System. Goals of the first project are the development and integration of new pile ALD of processes and materials for the employment in the complementary metal oxide semiconductor (CMOS) - logic technology. Beside the 40 pure space tools the scientists at the Fraunhofer CNT bring in extensive experiences in Prozess-und material characterisation, as well as the characterisation of nano-electronics devices also. Vorprozessierte test or product wafer are placed from ASM or their customer to the order and prozessiert at the Fraunhofer CNT under strict cross contamination requirements, which were developed by co-operation for many years with prominent chip manufacturers. Thus the results can be used directly in production, whereby our partners can generate costing and development time savings. Professor Peter K�cher, Leiter Fraunhofer of the CNT explained: � we look forward to a successful and long-term co-operation with the development of innovative and economical processes for CVD and ALD, with one the outfitter leading world-wide such as ASM �. Ivo Raaijmakers, boss of the technology department with ASM added: � we co-operated over 5 years successfully with CNT and are confident that this new cooperative F& Further successful projects will make possible. ��

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