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- Automation
LITHOSCALE® incorporates EVG’s MLE™ (Maskless Exposure) technology to bring the benefits of digital lithography to a wide range of applications and markets
EV Group Brings Maskless Lithography to High-Volume Manufacturing with LITHOSCALE
EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today introduced the LITHOSCALE® maskless exposure system – the first product platform to feature EVG’s revolutionary MLE™ (Maskless Exposure) technology. LITH…